The magnetic pump is mainly composed of a pump head, a magnetic drive device and other components. The pump head part is mainly composed of impeller, pump body, bearing, bushing, pump cover, pump shaft and other parts; the magnetic drive part is mainly composed of internal magnetic rotor, external magnetic rotor, isolation sleeve and other components; other parts mainly include Rack, base, motor, etc.
The working principle of the magnetic pump is: when the motor drives the outer magnetic rotor to rotate, the magnetic field can penetrate the air gap and the non-magnetic material, and drive the inner magnetic rotor connected with the impeller to rotate synchronously, realize the contactless transmission of the power, and transform the dynamic seal. For static sealing, the purpose of conveying liquid is achieved.
The magnetic characteristics: the pump shaft is changed into a closed static seal by the dynamic seal, which completely avoids the leakage of the medium. Eliminates the need for separate lubrication and cooling water, reducing energy consumption. When overloaded, the inner and outer magnetic rotors are relatively slippery, which has a protective effect on the motor and the pump. Ferromagnetic impurities and particles are not allowed to enter the magnetic actuator and the bearing friction pair; after transporting the medium which is easy to crystallize or precipitate, it should be flushed in time to ensure the service life of the sliding bearing.
When transporting media containing solid particles, it should be filtered at the inlet of the pump flow tube; under the specified temperature conditions, the medium temperature is strictly prohibited. Generally, the maximum use temperature is within 100 °C to prevent demagnetization. It is strictly forbidden to idling; in the case of the outlet valve being closed, the continuous running time of the pump must not exceed 2 minutes to prevent the magnetic actuator from overheating and failing.
Magnetic pumps have the following applications in wet etching equipment:
(1) Circulating filtration of chemical liquid: a circulating filtration system consisting of a magnetic pump, a circulating overflow tank, a filter, and a pipe fitting. The circulation filtration of the chemical solution is realized to ensure the uniformity of the temperature and concentration of the chemical solution in the process tank. Since the magnetic pump will cause a certain temperature rise of the liquid for a long time, it is not suitable for the process tank with high temperature control precision. Often used in solar cell pickling, texturing, cleaning and other equipment.
(2) Hot water injection and spraying: The wafer after chemical liquid treatment sometimes needs hot DI water spray rinsing. Generally, the DI water is first injected into the preheating tank, heated by the heater to the required liquid supply temperature, and then sent to the spraying device by the magnetic pump to achieve the cleaning of the wafer. Since the sliding friction of the magnetic pump bearing produces particles, it is not suitable for cleaning with high particle requirements.
Diamond Electroplated Grinding Wheel
DIY,special
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