The ultra-clean ice-cleaning device uses the ice crystal particles to spray the surface of the workpiece to achieve the purpose of removing surface deposits and degreasing. The cleanliness can reach 0.1μm. The device has two structural principles, which respectively produce two thickness ice particles. . (1) The principle of spray is shown in Figure 1. The ice particle diameter φ is 30 to 300 μm. Liquid nitrogen is injected into the container, and the nozzle at the top of the container is sprayed with ultrapure water mist, and the water mist is cooled by liquid nitrogen.
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